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SWS320-Fully Automatic Wafer Inspection / Sorting / Transfer System

8”-12”wafer application
Thinner wafer capability
LD & ULD from Cassette / Box / Jar ......
Configure with Loadports
Wafer Sorting application
Transferring application
Vision Inspection application
Microscope Inspection application
Platform modular design
PC based control with Windows OS
SECS/GEM or simple communication